Zirconium vacuum arc operation in a mixture of Ar and O ₂ gases: Ar effect on the arcing characteristics, deposition rate and coating properties

Keyphrases

• Ar Ion Bombardment 33%
• Arc Characteristics 100%
• Arc Current 33%
• Arc Deposition 33%
• Arc Voltage 33%
• Argon 66%
• Cathode Spot 33%
• Coating Deposition 33%
• Coating Hardness 33%
• Coating Properties 100%
• Coating Thickness 33%
• DC Arc 33%
• Deposition Rate 100%
• Electrical Characteristics 33%
• Energy Dispersive X-ray Spectroscopy 33%
• Extinction Coefficient 33%
• Flat Disk 33%
• Glass Substrate 33%
• Interference Rings 33%
• Ion Current Density 33%
• Ion Emission 33%
• Macroparticles 66%
• Magnetic Field 33%
• Monoclinic Phase 33%
• Nanoindentation Analysis 33%
• Optical Analysis 33%
• Optical Microscopy 33%
• Oxygen Effect 33%
• Partial Pressure 33%
• Plasma Conductivity 33%
• Plasma Ions 33%
• Plasma Jet 33%
• Profilometer 33%
• Rate Property 100%
• Refractive Index 33%
• Rotatable 33%
• Surface Oxidation 33%
• Torus 33%
• Vacuum Arc 100%
• X Ray Diffraction 33%
• X-ray Photoelectron Spectroscopy 33%
• Young's Modulus 33%
• Zirconia 100%
• Zirconium Oxide 33%
• ZrO2 Coating 66%

Engineering

• Arc Voltage 33%
• Cathode Spot 33%
• Coating Deposition 33%
• Coating Hardness 33%
• Coating Property 100%
• Coating Thickness 33%
• Deposition Rate 100%
• Electrical Discharge 33%
• Energy dispersive spectrometry 33%
• Extinction Coefficient 33%
• Glass Substrate 33%
• Indentation 33%
• Ion Current Density 33%
• Ion Implantation 33%
• Macroparticles 66%
• Magnetic Field 33%
• Monoclinic 33%
• Partial Pressure 33%
• Pressure (P) 33%
• Ray Diffraction 33%
• Ray Photoelectron Spectroscopy 33%
• Refractive Index 33%
• Refractivity 33%
• Young's Modulus 33%

Material Science

• Anode 33%
• Cathode 100%
• Density 33%
• Energy-Dispersive X-Ray Spectroscopy 66%
• Ion Bombardment 33%
• Nanoindentation 33%
• Refractive Index 33%
• Surface (Surface Science) 33%
• X-Ray Diffraction 33%
• X-Ray Photoelectron Spectroscopy 33%
• Young's Modulus 33%
• Zirconia 33%
• Zirconium 100%
• Zirconium Ion 33%