Z-axis micro gyroscope with optical sensing technique

Keyphrases

• Angle Random Walk 50%
• Bias Instability 50%
• Dual Sensing 50%
• Fabrication Methods 50%
• Grade Performance 50%
• In-Run 50%
• Integrated Electronics 50%
• Micro-gyroscope 100%
• Optical Detection 50%
• Optical Sensing 50%
• Optical Sensing Techniques 100%
• Optical System 50%
• Performance Studies 50%
• Rate Table 50%
• Response Detection 50%
• Scale Factor 50%
• Scaling Bias 50%
• Sense Mode 50%
• Sensing Approach 50%
• Silicon-on-insulator 50%
• Single Axis 50%
• Tuning Fork Gyroscope 50%
• Vacuum Packaging 50%

Engineering

• Figure of Merit 100%
• Optical Systems 100%
• Scale Factor 100%
• Sense Mode 100%
• Sensing Mechanisms 100%
• Silicon on Insulator 100%
• Simplifies 100%
• Tuning Fork 100%