Z-axis micro gyroscope with optical sensing technique

This work introduces the design, fabrication, integration and characterization, of a novel high-graded single axis tuning fork gyroscope (TFG), based on optical detection. This is the first time that the optical sensing approach is used for the in-plane sense mode response detection of a tactical grade micro gyroscope. The optical system is implemented in a fully functional vacuum package with integrated electronics. We present the results of the rate-table performance study, and the sensor's main figures of merit. We show that the use of dual sensing significantly simplifies the silicon on insulator (SOI) fabrication process, allowing the achievement of tactical grade performance, including angular random walk (ARW) of less than 0.2 [°/√hr] and in-run bias instability (BI) of less than 2 [°/hr]. We also show the behavior of various parameters such as scale factor and bias at various temperatures (in the range of-20 C° to 70 C°).