Abstract
Thin films of alternating Au, Ag, and Cu wedge-shaped metal layers were made by magnetron sputtering in order to develop a method for investigation of a multicomponent systems. X-ray-diffraction patterns of all as-deposited samples revealed satellites in the vicinity of (111) reflections, evidence of composition-modulated artificial superlattice formation. The experimental spectra are well explained by the kinematical diffraction theory for imperfect superlattices. Computer simulations have demonstrated extremely high sensitivity to the fluctuations ΔH/H of the superlattice period H. As a result, a rapid and simple method of ΔH/H determination is proposed.
Original language | English |
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Pages (from-to) | 2501-2506 |
Number of pages | 6 |
Journal | Journal of Applied Physics |
Volume | 74 |
Issue number | 4 |
DOIs | |
State | Published - 1993 |
Externally published | Yes |