Vapour Liquid Solid Growth Effects on InGaN Epilayers Composition Uniformity in Presence of Metal Droplets

Mani Azadmand; Stefano Vichi; Federico Guido Cesura; Sergio Bietti; Daniel Chrastina; Emiliano Bonera; Giovanni Maria Vanacore; Shiro Tsukamoto; Stefano Sanguinetti

doi:10.3390/nano12213887

Vapour Liquid Solid Growth Effects on InGaN Epilayers Composition Uniformity in Presence of Metal Droplets

Mani Azadmand, Stefano Vichi^*, Federico Guido Cesura, Sergio Bietti, Daniel Chrastina, Emiliano Bonera, Giovanni Maria Vanacore, Shiro Tsukamoto, Stefano Sanguinetti

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

Abstract

We investigated the composition uniformity of InGaN epilayers in presence of metal droplets on the surface. We used Plasma Assisted MBE to grow an InGaN sample partially covered by metal droplets and performed structural and compositional analysis. The results showed a marked difference in indium incorporation between the region under the droplets and between them. Based on this observation we proposed a theoretical model able to explain the results by taking into account the vapour liquid solid growth that takes place under the droplet by direct impingement of nitrogen adatoms.

Original language	English
Article number	3887
Journal	Nanomaterials
Volume	12
Issue number	21
DOIs	https://doi.org/10.3390/nano12213887
State	Published - Nov 2022
Externally published	Yes

Keywords

InGaN
metal droplets
molecular beam epitaxy
vapor–liquid–solid

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10.3390/nano12213887

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title = "Vapour Liquid Solid Growth Effects on InGaN Epilayers Composition Uniformity in Presence of Metal Droplets",

abstract = "We investigated the composition uniformity of InGaN epilayers in presence of metal droplets on the surface. We used Plasma Assisted MBE to grow an InGaN sample partially covered by metal droplets and performed structural and compositional analysis. The results showed a marked difference in indium incorporation between the region under the droplets and between them. Based on this observation we proposed a theoretical model able to explain the results by taking into account the vapour liquid solid growth that takes place under the droplet by direct impingement of nitrogen adatoms.",

keywords = "InGaN, metal droplets, molecular beam epitaxy, vapor–liquid–solid",

author = "Mani Azadmand and Stefano Vichi and Cesura, {Federico Guido} and Sergio Bietti and Daniel Chrastina and Emiliano Bonera and Vanacore, {Giovanni Maria} and Shiro Tsukamoto and Stefano Sanguinetti",

note = "Publisher Copyright: {\textcopyright} 2022 by the authors.",

year = "2022",

month = nov,

doi = "10.3390/nano12213887",

language = "אנגלית",

volume = "12",

journal = "Nanomaterials",

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T1 - Vapour Liquid Solid Growth Effects on InGaN Epilayers Composition Uniformity in Presence of Metal Droplets

AU - Azadmand, Mani

AU - Vichi, Stefano

AU - Cesura, Federico Guido

AU - Bietti, Sergio

AU - Chrastina, Daniel

AU - Bonera, Emiliano

AU - Vanacore, Giovanni Maria

AU - Tsukamoto, Shiro

AU - Sanguinetti, Stefano

PY - 2022/11

Y1 - 2022/11

N2 - We investigated the composition uniformity of InGaN epilayers in presence of metal droplets on the surface. We used Plasma Assisted MBE to grow an InGaN sample partially covered by metal droplets and performed structural and compositional analysis. The results showed a marked difference in indium incorporation between the region under the droplets and between them. Based on this observation we proposed a theoretical model able to explain the results by taking into account the vapour liquid solid growth that takes place under the droplet by direct impingement of nitrogen adatoms.

AB - We investigated the composition uniformity of InGaN epilayers in presence of metal droplets on the surface. We used Plasma Assisted MBE to grow an InGaN sample partially covered by metal droplets and performed structural and compositional analysis. The results showed a marked difference in indium incorporation between the region under the droplets and between them. Based on this observation we proposed a theoretical model able to explain the results by taking into account the vapour liquid solid growth that takes place under the droplet by direct impingement of nitrogen adatoms.

KW - InGaN

KW - metal droplets

KW - molecular beam epitaxy

KW - vapor–liquid–solid

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SN - 2079-4991

VL - 12

JO - Nanomaterials

JF - Nanomaterials

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M1 - 3887

ER -

Vapour Liquid Solid Growth Effects on InGaN Epilayers Composition Uniformity in Presence of Metal Droplets

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