TY - GEN
T1 - Vacuum arc deposition using refractory electrodes
AU - Beilis, I. I.
AU - Koulik, Y.
AU - Yankelevich, E.
AU - Arbilly, D.
AU - Boxman, R. L.
N1 - Publisher Copyright:
© 2014 IEEE.
PY - 2014/11/18
Y1 - 2014/11/18
N2 - Refractory metal plasma generated by a vacuum arc was used to deposit thin films. The deposition rate Vdep was measured for different electrode configurations: (1) a planar Zr cathode and a planar W anode-both 60mm diam, (2) 32 mm diam cylindrical W or Mo electrode pairs, and a (3) Nb cylindrical cathode (32 mm diam) closed by a BN plate and a 50 mm diam W shower-head cup anode with either (a) an array of 1 mm diameter exit holes or (b) one 4 mm diam hole Ta cup anode. For Zr films, Vdep was 0.8 μm/min at a distance 110 mm from the electrode axis at 90 s after arc ignition. For W films at 60 s after ignition and the planar electrode configuration, Vdep was 0.6 μm/min at a distance of 60 mm from the electrode axis. For Nb films deposited with the closed electrode configuration, Vdep was 0.3 μm/min at distance 80 mm from the front shower anode surface at 30 s after arc ignition. For cylindrical Mo electrode pair Vdep was about 0.4 μm/min at a distance of 110 mm, 70 s after 200 A arc ignition.
AB - Refractory metal plasma generated by a vacuum arc was used to deposit thin films. The deposition rate Vdep was measured for different electrode configurations: (1) a planar Zr cathode and a planar W anode-both 60mm diam, (2) 32 mm diam cylindrical W or Mo electrode pairs, and a (3) Nb cylindrical cathode (32 mm diam) closed by a BN plate and a 50 mm diam W shower-head cup anode with either (a) an array of 1 mm diameter exit holes or (b) one 4 mm diam hole Ta cup anode. For Zr films, Vdep was 0.8 μm/min at a distance 110 mm from the electrode axis at 90 s after arc ignition. For W films at 60 s after ignition and the planar electrode configuration, Vdep was 0.6 μm/min at a distance of 60 mm from the electrode axis. For Nb films deposited with the closed electrode configuration, Vdep was 0.3 μm/min at distance 80 mm from the front shower anode surface at 30 s after arc ignition. For cylindrical Mo electrode pair Vdep was about 0.4 μm/min at a distance of 110 mm, 70 s after 200 A arc ignition.
UR - http://www.scopus.com/inward/record.url?scp=84919363702&partnerID=8YFLogxK
U2 - 10.1109/DEIV.2014.6961732
DO - 10.1109/DEIV.2014.6961732
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AN - SCOPUS:84919363702
T3 - Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV
SP - 513
EP - 516
BT - ISDEIV 2014 - Proceedings of the 26th International Symposium on Discharges and Electrical Insulation in Vacuum
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 26th International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV 2014
Y2 - 28 September 2014 through 3 October 2014
ER -