TY - GEN
T1 - Two-Directional Operation of Bistable Latchable Micro Switch Actuated by a Single Electrode.
AU - Medina, L
AU - Gilat, R
AU - Ilic, B
AU - Krylov, S
PY - 2017/1/1
Y1 - 2017/1/1
N2 - Curved micromechanical beams are a versatile platform for exploring multistable behavior, with potential applications in mechanical based logic elements and electrical and optical switches. Here we demonstrate bidirectional electrostatic actuation of a bistable, latched, micromechanical beam by the same electrode, which was used for the snap-through switching of the device. The release of the mechanically-latched beam is achieved by pre-loading the structure using a rising voltage applied to the electrode, followed by a sudden decrease of the voltage. This abrupt removal of the loading results in a transient response and dynamic snap-back of the beam.
AB - Curved micromechanical beams are a versatile platform for exploring multistable behavior, with potential applications in mechanical based logic elements and electrical and optical switches. Here we demonstrate bidirectional electrostatic actuation of a bistable, latched, micromechanical beam by the same electrode, which was used for the snap-through switching of the device. The release of the mechanically-latched beam is achieved by pre-loading the structure using a rising voltage applied to the electrode, followed by a sudden decrease of the voltage. This abrupt removal of the loading results in a transient response and dynamic snap-back of the beam.
U2 - 10.3390/proceedings1040277
DO - 10.3390/proceedings1040277
M3 - ???researchoutput.researchoutputtypes.contributiontobookanthology.conference???
C2 - 31093601
VL - 1
T3 - Proceedings (MDPI)
BT - Proceedings, 2017, Eurosensors 2017
ER -