TY - JOUR
T1 - Towards fully polymeric electroactive micro actuators with conductive polymer electrodes
AU - Shklovsky, Jenny
AU - Reuveny, Amir
AU - Sverdlov, Yelena
AU - Krylov, Slava
AU - Shacham-Diamand, Yosi
N1 - Publisher Copyright:
© 2018 Elsevier B.V.
PY - 2018/11/5
Y1 - 2018/11/5
N2 - The performance of micro devices actuated using electroactive polymers is often limited by the high stiffness of metallic electrodes, which prevents the polymeric components extension. In this work we report on an approach allowing to reduce the use of metals to a minimum by incorporating softer conductive polymer electrodes. A multilayered actuator incorporating polyimide (PI) substrate and a thin electroactive polymer (EAP) layer of P(VDF-TrFE-CFE) squeezed between polyaniline (PANI) electrodes was fabricated and characterized. The PANI layer was electrodeposited on the electroactive structures using cyclic voltammetry. Our results show that while the use of conjugate conductive polymer electrodes is feasible, the influence of the thin metallic seed layers required for electro-deposition is significant. The proposed electro-deposition based polymeric process is highlighted by its simplicity and relatively low cost, compared to common Physical Vapor Deposition processes, and can be extended to other polymers.
AB - The performance of micro devices actuated using electroactive polymers is often limited by the high stiffness of metallic electrodes, which prevents the polymeric components extension. In this work we report on an approach allowing to reduce the use of metals to a minimum by incorporating softer conductive polymer electrodes. A multilayered actuator incorporating polyimide (PI) substrate and a thin electroactive polymer (EAP) layer of P(VDF-TrFE-CFE) squeezed between polyaniline (PANI) electrodes was fabricated and characterized. The PANI layer was electrodeposited on the electroactive structures using cyclic voltammetry. Our results show that while the use of conjugate conductive polymer electrodes is feasible, the influence of the thin metallic seed layers required for electro-deposition is significant. The proposed electro-deposition based polymeric process is highlighted by its simplicity and relatively low cost, compared to common Physical Vapor Deposition processes, and can be extended to other polymers.
KW - Conductive polymer
KW - Electropolymerization
KW - Flexible actuator
KW - Microprocessing
KW - Polyaniline
KW - Polymeric MEMS
UR - http://www.scopus.com/inward/record.url?scp=85050808065&partnerID=8YFLogxK
U2 - 10.1016/j.mee.2018.07.012
DO - 10.1016/j.mee.2018.07.012
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AN - SCOPUS:85050808065
SN - 0167-9317
VL - 199
SP - 58
EP - 62
JO - Microelectronic Engineering
JF - Microelectronic Engineering
ER -