@article{34b296e589064bb0845b3a386a2a0122,
title = "Tomographic study of atomic-scale redistribution of platinum during the silicidation of Ni0.95 Pt0.05 /Si (100) thin films",
abstract = "Atom-probe tomography was utilized to study the distribution of Pt after silicidation of a solid-solution Ni0.95 Pt0.05 thin film on Si(100). Direct evidence of Pt short-circuit diffusion via grain boundaries, Harrison's type-B regime, is found after silicidation to form (Ni0.99 Pt0.01) Si. This underscores the importance of interfacial phenomena for stabilizing this low-resistivity phase, providing insights into the modification of NiSi texture, grain size, and morphology caused by Pt. Platinum segregates at the (Ni0.99 Pt0.01) Si/Si (100) interface, which may be responsible for the increased resistance of (Ni0.99 Pt0.01) Si to agglomeration. The relative shift in work function between as-deposited and annealed states is greater for Ni(Pt)Si than for NiSi.",
author = "Praneet Adusumilli and Lauhon, \{Lincoln J.\} and Seidman, \{David N.\} and Murray, \{Conal E.\} and Ori Avayu and Yossi Rosenwaks",
note = "Funding Information: This research is supported by Semiconductor Research Corporation, Contract No. 1441.001. Atom-probe tomographic measurements were performed at the Northwestern University Center for Atom-Probe Tomography (NUCAPT), which is managed by Research Assistant Professor D. Isheim. The 3D LEAP tomograph was purchased with funding from the NSF-MRI (Grant No. DMR 0420532) and ONR-DURIP (Grant No. N00014-0400798) programs. The FEI dual-beam FIB was used in the EPIC facility of the NUANCE Center at Northwestern University.",
year = "2009",
doi = "10.1063/1.3099970",
language = "אנגלית",
volume = "94",
journal = "Applied Physics Letters",
issn = "0003-6951",
publisher = "American Institute of Physics",
number = "11",
}