TY - JOUR
T1 - Three-dimensional thin-film Li-ion microbatteries for autonomous MEMS
AU - Nathan, Menachem
AU - Golodnitsky, Diana
AU - Yufit, Vladimir
AU - Strauss, Ela
AU - Ripenbein, Tania
AU - Shechtman, Inna
AU - Menkin, Svetlana
AU - Peled, Emanuel
N1 - Funding Information:
Manuscript received November 12, 2004; revised March 3, 2005. The financial support for this project was provided by RAMOT—Tel Aviv University Authority for Applied Research and Industrial Development, Ltd. Subject Editor O. Tabata. M. Nathan, V. Yufit, and T. Ripenbein are with the Department of Physical Electronics, School of Electrical Engineering, Tel Aviv University, Tel Aviv 69978, Israel (e-mail: [email protected]). D. Golodnitsky is with the School of Chemistry and Wolfson Applied Materials Research Center, Tel Aviv University, Tel Aviv 69978, Israel. E. Strauss, I. Shechtman, S. Menkin, and E. Peled are with the School of Chemistry, Tel Aviv University, Tel Aviv 69978, Israel. Digital Object Identifier 10.1109/JMEMS.2005.851860
PY - 2005/10
Y1 - 2005/10
N2 - Autonomous MEMS require similarly miniaturized power sources. In this paper, we present the first working three-dimensional (3-D) rechargeable Li-ion thin-film microbattery technology that is compatible with MEMS requirements. The technology has been developed, and full 3-D cells have been manufactured on both glass and silicon substrates. Our 3-D microbatteries have a sandwich-like structure of conformal thin-film electrodes, electrolyte and current collectors. The films are deposited sequentially on all available surfaces of a perforated substrate (e.g., silicon or a glass microchannel plate or "MCP") using wet chemistry. The substrate has thousands of high-aspect ratio holes per square cm, thereby providing more than an order of magnitude increase in surface area per given footprint (original 2-D substrate area). The full 3-D cell consists of a Ni cathode current collector, a MoOySz cathode, a hybrid polymer electrolyte (HPE) and a lithiated graphite anode that also serves as anode current collector. One 3-D cell with a roughly 1-μm-thick cathode ran at C/10 to 2C charge/discharge rates and room temperature for 200 cycles with 0.2% per cycle capacity loss and about 100% Faradaic efficiency. The cell exhibited a capacity of 2 mAh/cm2, about 30 times higher than the capacity of a similarly built planar (2-D) cell with the same footprint and same cathode thickness.
AB - Autonomous MEMS require similarly miniaturized power sources. In this paper, we present the first working three-dimensional (3-D) rechargeable Li-ion thin-film microbattery technology that is compatible with MEMS requirements. The technology has been developed, and full 3-D cells have been manufactured on both glass and silicon substrates. Our 3-D microbatteries have a sandwich-like structure of conformal thin-film electrodes, electrolyte and current collectors. The films are deposited sequentially on all available surfaces of a perforated substrate (e.g., silicon or a glass microchannel plate or "MCP") using wet chemistry. The substrate has thousands of high-aspect ratio holes per square cm, thereby providing more than an order of magnitude increase in surface area per given footprint (original 2-D substrate area). The full 3-D cell consists of a Ni cathode current collector, a MoOySz cathode, a hybrid polymer electrolyte (HPE) and a lithiated graphite anode that also serves as anode current collector. One 3-D cell with a roughly 1-μm-thick cathode ran at C/10 to 2C charge/discharge rates and room temperature for 200 cycles with 0.2% per cycle capacity loss and about 100% Faradaic efficiency. The cell exhibited a capacity of 2 mAh/cm2, about 30 times higher than the capacity of a similarly built planar (2-D) cell with the same footprint and same cathode thickness.
KW - Li-ion 3-D thin-film microbattery
KW - Lithium 3-D thin-film microbattery
KW - MEMS
KW - Microchannel plate
UR - http://www.scopus.com/inward/record.url?scp=27644447469&partnerID=8YFLogxK
U2 - 10.1109/JMEMS.2005.851860
DO - 10.1109/JMEMS.2005.851860
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AN - SCOPUS:27644447469
SN - 1057-7157
VL - 14
SP - 879
EP - 885
JO - Journal of Microelectromechanical Systems
JF - Journal of Microelectromechanical Systems
IS - 5
ER -