Thin-film conformal fluorescent SU8-phenylenediamine

Hani Barhum*, Denis S. Kolchanov, Mohammad Attrash, Razan Unis, Janis Alnis, Toms Salgals, Ibrahim Yehia, Pavel Ginzburg

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

1 Scopus citations


The SU8 polymer is a negative photoresist widely used to produce high-quality coatings, with controllable thicknesses ranging from nanometers to millimeters, depending on fabrication protocols. Apart from conventional use cases in microelectronics and fluidics, SU8 is quite an attractive platform in nanophotonics. This material, being straightforwardly processed by ultraviolet lithography, is transparent to wavelengths longer than 500 nm. However, introducing fluorescent agents within the SU8 matrix remains a challenge owing to its high hydrophobicity. Here, we develop a process, where colorful quantum dots co-participate in the polymerization process by epoxide amination and become a part of a new fluorescent material - SU8-phenylenediamine. Through comprehensive characterization methods, including XPS and 1H-NMR analyses, we demonstrate that m-PD covalently binds to SU8 epoxy sites with its molecular amine, virtually forming a new material and not just a mixture of two compounds. After characterizing the new strongly fluorescent platform, thin 300 nm films were created on several surfaces, including a conformal coverage of a nanofluidic capillary. This new process provides opportunities to incorporate various functional molecules into optoelectronic devices without the need for multistep deposition and surface functionalization.

Original languageEnglish
Pages (from-to)17544-17554
Number of pages11
Issue number43
StatePublished - 3 Oct 2023


FundersFunder number
European Research Council802279
European Research Council
Ministry of Science, Technology and Space79518
Ministry of Science, Technology and Space
Tel Aviv University
European Regional Development Fund1.1.1.5/19/A/003
European Regional Development Fund
PAZY Foundation01021248
PAZY Foundation


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