Thermoelastic damping in micro- and nanomechanical systems

Ron Lifshitz, M. Roukes

Research output: Contribution to journalArticlepeer-review


The importance of thermoelastic damping as a fundamental dissipation mechanism for small-scale mechanical resonators is evaluated in light of recent efforts to design high-(Formula presented) micrometer- and nanometer-scale electromechanical systems. The equations of linear thermoelasticity are used to give a simple derivation for thermoelastic damping of small flexural vibrations in thin beams. It is shown that Zener’s well-known approximation by a Lorentzian with a single thermal relaxation time slightly deviates from the exact expression.

Original languageEnglish
Pages (from-to)5600-5609
Number of pages10
JournalPhysical Review B - Condensed Matter and Materials Physics
Issue number8
StatePublished - 2000
Externally publishedYes


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