The pull-in behavior of electrostatically actuated bistable microstructures

Keyphrases

• Microstructure 100%
• Electrostatically Actuated 100%
• Deflection 100%
• Snap-through 100%
• Pull-In Behavior 100%
• Scanning Electron Microscopy 50%
• Electrostatic Force 50%
• Numerical Analysis 50%
• Deep Reactive Ion Etching 50%
• Closed-form Approximation 50%
• Bistability 50%
• Pull-in Instability 50%
• Critical Voltage 50%
• Electrostatic Nonlinearity 50%
• Galerkin 50%
• Lumped Model 50%
• Order Reduction 50%
• Silicon-on-insulator Wafer 50%
• Initial Elevation 50%
• Straight Beam 50%
• Mechanical Nonlinearity 50%
• Euler-Bernoulli 50%
• Clamped-clamped Microbeam 50%
• Actual Dimension 50%
• Deflection Characteristics 50%
• In-plane Response 50%

Engineering

• Electrostatics 100%
• Microstructure 100%
• Bistables 100%
• Snap-Through 100%
• Good Agreement 50%
• Experimental Investigation 50%
• Closed Form 50%
• Shallower 50%
• Nonlinearity 50%
• Deep Reactive Ion Etching 50%
• Buckling 50%
• Silicon on Insulator 50%
• Theoretical Investigation 50%
• Critical Voltage 50%
• Deflection Characteristic 50%

Material Science

• Snap-Through 100%
• Silicon 50%
• Scanning Electron Microscopy 50%
• Reactive Ion Etching 50%