TY - GEN
T1 - The influence of ambient pressure on the dynamic response of RF mems switches
AU - Ohana, Avihay
AU - Aharon, Oren
AU - Maimon, Ronen
AU - Nepomnyashchy, Boris
AU - Kogut, Lior
PY - 2010
Y1 - 2010
N2 - A study of the dynamic behavior of an RF MEMS switch is presented at different operating conditions. Experimental results for the actuation and release time and Q-factor as a function of the ambient pressure and actuation voltage are compared to theoretical predictions based on existing model. Optimal operating conditions (ambient pressure and actuation voltage) are determined based on two criterions: minimal actuation and release time and minimal oscillations upon switch release. In light of the experimental results optimal operating conditions determined to be 1.4Vpi at a pressure of a few torrs where actuation and release time are equal and short enough with no release oscillations. Three pressure regimes are identified with characteristic behavior of the Q-factor and actuation and release time in each regime. These behaviors have significant implications in many MEMS devices, especially RF MEMS switches.
AB - A study of the dynamic behavior of an RF MEMS switch is presented at different operating conditions. Experimental results for the actuation and release time and Q-factor as a function of the ambient pressure and actuation voltage are compared to theoretical predictions based on existing model. Optimal operating conditions (ambient pressure and actuation voltage) are determined based on two criterions: minimal actuation and release time and minimal oscillations upon switch release. In light of the experimental results optimal operating conditions determined to be 1.4Vpi at a pressure of a few torrs where actuation and release time are equal and short enough with no release oscillations. Three pressure regimes are identified with characteristic behavior of the Q-factor and actuation and release time in each regime. These behaviors have significant implications in many MEMS devices, especially RF MEMS switches.
UR - http://www.scopus.com/inward/record.url?scp=84881420759&partnerID=8YFLogxK
U2 - 10.1115/IMECE2010-38575
DO - 10.1115/IMECE2010-38575
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AN - SCOPUS:84881420759
SN - 9780791844472
T3 - ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
SP - 171
EP - 175
BT - ASME 2010 International Mechanical Engineering Congress and Exposition, IMECE 2010
T2 - ASME 2010 International Mechanical Engineering Congress and Exposition, IMECE 2010
Y2 - 12 November 2010 through 18 November 2010
ER -