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The effect of tungsten and boron on the Cu barrier and oxidation properties of thin electroless cobalt-tungsten-boron films
Hila Einati*, Vadim Bogush, Yelena Sverdlov, Yuri Rosenberg, Yosi Shacham-Diamand
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
49
Scopus
citations