The effect of hydrogen on boron diffusion in SiO₂

Keyphrases

• Silica 100%
• Boron Diffusion 100%
• Diffusion Coefficient 66%
• Diffusivity 66%
• Boron 66%
• Activation Energy 66%
• Hydrogen Partial Pressure 66%
• Temperature Effect 33%
• Oxides 33%
• Ion Implantation 33%
• Temperature Range 33%
• Square Root 33%
• Silicon Dioxide 33%
• Boron Ions 33%
• Diffusion Characteristics 33%
• Fixed Pressure 33%
• Boron Atom 33%
• Partial Pressure 33%
• Boron in Silicon 33%
• Exponential Rule 33%
• Electrical Method 33%
• Annealing Atmosphere 33%
• Pre-exponential Factor 33%

Engineering

• Silicon Dioxide 100%
• Diffusivity 50%
• Diffusion Coefficient 50%
• Activation Energy 50%
• Hydrogen Partial Pressure 50%
• Square Root 25%
• Temperature Range 25%
• Temperature Dependence 25%
• Partial Pressure 25%

Material Science

• Boron 100%
• Diffusivity 80%
• Activation Energy 40%
• Oxide Compound 20%
• Silicon Dioxide 20%
• Boron Ion 20%