TY - JOUR
T1 - Temperature distribution dependence on refractory anode thickness in a vacuum arc
T2 - Experiment
AU - Beilis, Isak I.
AU - Koulik, Yosef
AU - Boxman, Raymond L.
N1 - Funding Information:
Manuscript received November 1, 2010; revised January 5, 2011; accepted February 7, 2011. Date of publication April 5, 2011; date of current version June 10, 2011. This work was supported by a Grant from the Israel Science Foundation.
PY - 2011/6
Y1 - 2011/6
N2 - The time-dependent anode temperature was measured in a hot refractory anode vacuum arc (HRAVA) sustained between a consumed water-cooled cylindrical Cu cathode and nonconsumed cylindrical W anodes with thicknesses of d = 5, 10, 15, 20 and 30 mm separated by gaps of 5, 10, 15, and 20 mm. Arc currents of I = 130, 150, 175, and 200 A were applied for periods up to 210 s. The anode temperature was measured using high-temperature thermocouples at different points in the anode body. The visual radiation emitted by the plasma plume was recorded with a digital camera. The anode temperature increased with time, reaching a steady-state value which slightly increased with arc current. The anode temperature decreased with the gap and was higher for thinner anodes. When d was increased from 5 to 30 mm, the time for the anode front-surface temperature to reach the steady state increased from 45 to 140 s, while this temperature decreased from 2525 to 2325 K (I = 175 A). Thus, minimizing d advantageously minimizes the start-up transient when using the radially expanding HRAVA plasma plume for thin-film deposition.
AB - The time-dependent anode temperature was measured in a hot refractory anode vacuum arc (HRAVA) sustained between a consumed water-cooled cylindrical Cu cathode and nonconsumed cylindrical W anodes with thicknesses of d = 5, 10, 15, 20 and 30 mm separated by gaps of 5, 10, 15, and 20 mm. Arc currents of I = 130, 150, 175, and 200 A were applied for periods up to 210 s. The anode temperature was measured using high-temperature thermocouples at different points in the anode body. The visual radiation emitted by the plasma plume was recorded with a digital camera. The anode temperature increased with time, reaching a steady-state value which slightly increased with arc current. The anode temperature decreased with the gap and was higher for thinner anodes. When d was increased from 5 to 30 mm, the time for the anode front-surface temperature to reach the steady state increased from 45 to 140 s, while this temperature decreased from 2525 to 2325 K (I = 175 A). Thus, minimizing d advantageously minimizes the start-up transient when using the radially expanding HRAVA plasma plume for thin-film deposition.
KW - Anode temperature
KW - anode thickness
KW - refractory anode
KW - thermocouple
KW - vacuum arc
UR - http://www.scopus.com/inward/record.url?scp=79958786492&partnerID=8YFLogxK
U2 - 10.1109/TPS.2011.2121924
DO - 10.1109/TPS.2011.2121924
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AN - SCOPUS:79958786492
SN - 0093-3813
VL - 39
SP - 1303
EP - 1306
JO - IEEE Transactions on Plasma Science
JF - IEEE Transactions on Plasma Science
IS - 6 PART 1
M1 - 5740613
ER -