Tactical grade micro gyroscope with dual capcitive/optical sensing

Keyphrases

• Optical Sensing 100%
• Micro-gyroscope 100%
• Performance Studies 50%
• Optics 50%
• Detection Method 50%
• Fabrication Methods 50%
• Silicon-on-insulator 50%
• Sensing Approach 50%
• Integrated Electronics 50%
• Single Axis 50%
• Sense Mode 50%
• Packaged Device 50%
• Tuning Fork Gyroscope 50%
• Capacitive Sensing 50%
• In-Run 50%
• Dual Detection 50%
• Bias Instability 50%
• Angle Random Walk 50%
• Grade Performance 50%
• Dual Sensing 50%
• Rate Table 50%

Engineering

• Capacitive 100%
• Simplifies 50%
• Figure of Merit 50%
• Silicon on Insulator 50%
• Tuning Fork 50%
• Detection Technique 50%
• Sense Mode 50%