Study on fabrication and optical properties of Ge-Sb-Se thin films

Wei Zhang*, Yu Chen, Jing Fu, Fei Fei Chen, Xiang Shen, Shi Xun Dai, Chang Gui Lin, Tie Feng Xu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review


Several methods of fabricating chalcogenide thin films are introduced. In this paper, thermal evaporation and radio frequency methods are used to fabricate Ge-Sb-Se thin films. The thicknesses and roughnesses of the films are measured by surface profile-meter. The film growth rates are calculated. The component difference between film and target material is tested by X-ray photoelectron spectroscopy. The third-order optical nonlinearity and the transmission spectra of films fabricated by thermal evaporation are investigated using femto-second Z-scan method and spectrophotometer, to obtain the values of nonlinear refraction, nonlinear absorption and thickness of films. The results show that the films fabricated by thermal evaporation have excellent physical structures and optical properties, and possess promising potential applications in integrated optical devices.

Original languageEnglish
Article number056801
JournalWuli Xuebao/Acta Physica Sinica
Issue number5
StatePublished - 5 Mar 2012
Externally publishedYes


  • Chalcogenide glasses
  • Chalcogenide thin films
  • Optical properties
  • Thermal evaporation


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