TY - GEN
T1 - Study of lithium diffusion into silicon-germanium crystals
AU - Ruzin, Arie
AU - Abrosimov, Nikolai
AU - Litovchenko, Piotr
PY - 2008
Y1 - 2008
N2 - In this study lithium atoms were difhsed into single crystal, Czochralski grown silicon-germanium. It is shown that the diffusion coefficient has a considerable dependence on germanium concentration. In addition the surface concentration of lithium in silicon germanium is significantly higher than the values reported for float zone grown pure silicon crystals. The study compares direct and indirect characterization methods used to determine the lithium profile in silicon germanium. The Si1-xGex semiconductors used in this study contain 2.6% and 5.4% (atomic concentration) of germanium and have measured resistivities of 100-200 Ωxcm.
AB - In this study lithium atoms were difhsed into single crystal, Czochralski grown silicon-germanium. It is shown that the diffusion coefficient has a considerable dependence on germanium concentration. In addition the surface concentration of lithium in silicon germanium is significantly higher than the values reported for float zone grown pure silicon crystals. The study compares direct and indirect characterization methods used to determine the lithium profile in silicon germanium. The Si1-xGex semiconductors used in this study contain 2.6% and 5.4% (atomic concentration) of germanium and have measured resistivities of 100-200 Ωxcm.
UR - http://www.scopus.com/inward/record.url?scp=84885940876&partnerID=8YFLogxK
U2 - 10.1142/9789812819093_0102
DO - 10.1142/9789812819093_0102
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AN - SCOPUS:84885940876
SN - 9812819088
SN - 9789812819086
T3 - Astroparticle, Particle and Space Physics, Detectors and Medical Physics Applications - Proceedings of the 10th Conference
SP - 591
EP - 597
BT - Astroparticle, Particle and Space Physics, Detectors and Medical Physics Applications - Proceedings of the 10th Conference
PB - World Scientific Publishing Co. Pte Ltd
T2 - International Conference on Advanced Technology and Particle Physics, ICATPP 2007
Y2 - 8 October 2007 through 12 October 2007
ER -
