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Structural, optical, and interface properties of sputtered AlN thin films under different hydrogen dilution conditions
L. Montañez*, J. A. Töfflinger, R. Grieseler, P. Fischer, A. Ben-Or, J. A. Guerra, R. Weingärtner, H. J. Osten, A. Kribus
*Corresponding author for this work
Research output: Contribution to journal › Conference article › peer-review