Stress-based vapor sensing using resonant microbridges

D. R. Southworth, L. M. Bellan, Y. Linzon, H. G. Craighead, J. M. Parpia

Research output: Contribution to journalArticlepeer-review

Abstract

We demonstrate that silicon-polymer composite microbridges provide a robust means of water vapor detection at ambient pressure. Volumetric changes in the reactive polymer alter the tension in a doubly clamped structure leading to large and rapid changes in the resonance frequency. We demonstrate stress-based sensing of water vapor in ambient pressure nitrogen using doubly clamped buckled beams coated with a hygroscopic polymer. We show stress sensitivity of around 20 kPa (∼170 ppb of water vapor) and subsecond response time for coated microbridges.

Original languageEnglish
Article number163503
JournalApplied Physics Letters
Volume96
Issue number16
DOIs
StatePublished - 19 Apr 2010
Externally publishedYes

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