Stress-based resonant volatile gas microsensor operated near the critically buckled state

Daniel J. Joe, Yoav Linzon, Vivekananda P. Adiga, Robert A. Barton, Moonkyung Kim, Bojan Ilic, Slava Krylov, Jeevak M. Parpia*, Harold G. Craighead

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

30 Scopus citations

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Engineering