Spin-On Films Add New Dimension to ULSI Circuits

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Original language	English
Pages (from-to)	30-34
Number of pages	5
Journal	IEEE Circuits and Devices Magazine
Volume	9
Issue number	6
DOIs	https://doi.org/10.1109/101.261889
State	Published - Nov 1993
Externally published	Yes

Access to Document

@article{01513c30d35643b3b5477f09240506a8,

title = "Spin-On Films Add New Dimension to ULSI Circuits",

author = "Giannelis, {Emmanuel P.} and Shacham-Diamand, {Yosi Y.}",

year = "1993",

month = nov,

doi = "10.1109/101.261889",

language = "אנגלית",

volume = "9",

pages = "30--34",

journal = "IEEE Circuits and Devices Magazine",

issn = "8755-3996",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "6",

}

TY - JOUR

T1 - Spin-On Films Add New Dimension to ULSI Circuits

AU - Giannelis, Emmanuel P.

AU - Shacham-Diamand, Yosi Y.

PY - 1993/11

Y1 - 1993/11

UR - http://www.scopus.com/inward/record.url?scp=3643049349&partnerID=8YFLogxK

U2 - 10.1109/101.261889

DO - 10.1109/101.261889

M3 - ???researchoutput.researchoutputtypes.contributiontojournal.article???

AN - SCOPUS:3643049349

SN - 8755-3996

VL - 9

SP - 30

EP - 34

JO - IEEE Circuits and Devices Magazine

JF - IEEE Circuits and Devices Magazine

IS - 6

ER -