Spatially resolved correlation of active and total doping concentrations in VLS grown nanowires

Iddo Amit, Uri Givan, Justin G. Connell, Dennis F. Paul, John S. Hammond, Lincoln J. Lauhon, Yossi Rosenwaks

Research output: Contribution to journalArticlepeer-review

Abstract

Controlling axial and radial dopant profiles in nanowires is of utmost importance for NW-based devices, as the formation of tightly controlled electrical junctions is crucial for optimization of device performance. Recently, inhomogeneous dopant profiles have been observed in vapor-liquid-solid grown nanowires, but the underlying mechanisms that produce these inhomogeneities have not been completely characterized. In this work, P-doping profiles of axially modulation-doped Si nanowires were studied using nanoprobe scanning Auger microscopy and Kelvin probe force microscopy in order to distinguish between vapor-liquid-solid doping and the vapor-solid doping. We find that both mechanisms result in radially inhomogeneous doping, specifically, a lightly doped core surrounded by a heavily doped shell structure. Careful design of dopant modulation enables the contributions of the two mechanisms to be distinguished, revealing a surprisingly strong reservoir effect that significantly broadens the axial doping junctions.

Original languageEnglish
Pages (from-to)2598-2604
Number of pages7
JournalNano Letters
Volume13
Issue number6
DOIs
StatePublished - 12 Jun 2013

Keywords

  • Kelvin probe force microscopy
  • Nanowires
  • VLS
  • doping
  • nanoprobe scanning Auger microscopy

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