Solid state electret microphones

Ya O. Roizin, V. Vasilenko, S. Komarov

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

A novel solid state electret microphone is proposed in this paper. The distinguishing feature of this device compared with analogous subminiature microphones is application of silicon frames, silicon membranes and inorganic silicon based electret layers. The proposed microphones are made using micromechanical and microelectronical techniques already employed in fabrication of static pressure sensors. Charging of the electret layer is performed after the complete fabrication of the microphone chip.

Original languageEnglish
Title of host publication8th International Symposium on Electrets, ISE 1994 - Proceedings
EditorsJ. Lewiner, C. Alquie, D. Morisseau
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages997-1003
Number of pages7
ISBN (Electronic)0780319400, 9780780319400
DOIs
StatePublished - 1994
Externally publishedYes
Event8th International Symposium on Electrets, ISE 1994 - Paris, France
Duration: 7 Sep 19949 Sep 1994

Publication series

Name8th International Symposium on Electrets, ISE 1994 - Proceedings

Conference

Conference8th International Symposium on Electrets, ISE 1994
Country/TerritoryFrance
CityParis
Period7/09/949/09/94

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