Soft lithography molding of polymer integrated optical devices: Reduction of the background residue

George T. Paloczi*, Yanyi Huang, Jacob Scheuer, Amnon Yariv

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract

The soft-mold replication technique for fabrication of polymer integrated optical devices was discussed. Several effects of the background residue were investigated numerically. In addition, the coupling ratio of a directional coupler and the radiation loss in a waveguide bend were also studied. It was found that the residue reduces through dilution of the core polymer solution.

Original languageEnglish
Pages (from-to)1764-1769
Number of pages6
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume22
Issue number4
DOIs
StatePublished - Jul 2004
Externally publishedYes

Fingerprint

Dive into the research topics of 'Soft lithography molding of polymer integrated optical devices: Reduction of the background residue'. Together they form a unique fingerprint.

Cite this