The soft-mold replication technique for fabrication of polymer integrated optical devices was discussed. Several effects of the background residue were investigated numerically. In addition, the coupling ratio of a directional coupler and the radiation loss in a waveguide bend were also studied. It was found that the residue reduces through dilution of the core polymer solution.
|Number of pages
|Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
|Published - Jul 2004