Single layer tilting actuator with multiple close-gap electrodes

T. Shmilovich, S. Krylov

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We report on the novel architecture and operational principle of a tilting electrostatic actuator fabricated using single structural layer. The actuator is fabricated using silicon on insulator (SOI) technology and incorporates comb-like high aspect ratio electrodes oriented in the direction parallel to the rotation axis of the tilting element. Tilting motion is accompanied by the decrease of the distance between the electrodes, resulting in the non-uniform distribution of electrostatic pressure and appearance of the actuation torque. A feasibility study is performed using a reduced order model of the electrostatically actuated device and verified by a coupled three-dimensional simulation. Experimental results suggest that this architecture can be efficiently used for static and resonant operation of electrostatic devices where the tilting motion is desirable.

Original languageEnglish
Title of host publicationProceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages675-678
Number of pages4
ISBN (Print)1424409519, 9781424409518
DOIs
StatePublished - 2007
Event20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007 - Kobe, Japan
Duration: 21 Jan 200725 Jan 2007

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

Conference20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007
Country/TerritoryJapan
CityKobe
Period21/01/0725/01/07

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