Simple method of enhancing magnetic filter efficiency

E. Gidalevich, R. L. Boxman, S. Goldsmith

Research output: Contribution to conferencePaperpeer-review

Abstract

Filtered vacuum arc deposition is a physical vapor deposition technique for fabricating thin films and coatings. Metal vapor plasma is generated at extremely hot, naturally occurring, minute cathode spots, together with liquid droplets, or macroparticles of the cathode materials. To remove the macroparticles, the latter is passed through a curved duct using a magnetic field parallel to its axis. The influence of vacuum arc cathode displacement on the plasma beam propagation in a magnetic toroidal plasma duct, and its effect on the plasma transmission efficiency is calculated.

Original languageEnglish
Pages581-584
Number of pages4
StatePublished - 1998
EventProceedings of the 1998 18th Interantional Symposium on Discharges and Electrical Insulation in Vacuum. Part 1 (of 2) - Eindhoven, Neth
Duration: 17 Aug 199821 Aug 1998

Conference

ConferenceProceedings of the 1998 18th Interantional Symposium on Discharges and Electrical Insulation in Vacuum. Part 1 (of 2)
CityEindhoven, Neth
Period17/08/9821/08/98

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