Silver halide integrated waveguides for sensing applications in the mid-infrared

T. Lewi*, A. Katzir

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review


We report the demonstration of single mode AgClxBr1-x channel waveguides for mid-infrared range. The waveguides were made by the deposition of AgClxBr1-x layers on top of a Ag/Ti/SiO 2/Si substrate, followed by photolithographic and lift-off processing. We showed that these waveguides operate in a single mode for the 6-14 μm band. The propagation losses of 20 dB/cm were measured at λ=10.6 μm using the cut-back method. We discuss the possible propagation losses mechanisms and show that the waveguide sidewall roughness is likely the major contributor for these losses. Using this fabrication process we have also realized Y-couplers and splitters. The development of these waveguides is a crucial step towards realizing on-chip AgClxBr 1-x mid-infrared integrated optical circuits which will be used for applications such as chemical sensing and spectro-interferometry for planet detection.

Original languageEnglish
Title of host publicationInfrared Sensors, Devices, and Applications II
StatePublished - 2012
EventInfrared Sensors, Devices, and Applications II - San Diego, CA, United States
Duration: 14 Aug 201215 Aug 2012

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


ConferenceInfrared Sensors, Devices, and Applications II
Country/TerritoryUnited States
CitySan Diego, CA


  • Channel waveguides
  • Chemical sensing
  • Integrated optics
  • Mid-infrared
  • Nulling interferometry
  • Silver halide


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