Silicon wafer oxygenation from SiO₂ layers for radiation hard detectors

Engineering & Materials Science

• Oxygenation 100%
• Silicon wafers 83%
• Oxygen 55%
• Radiation 54%
• Silicon 54%
• Detectors 53%
• Fabrication 20%
• Thermal diffusion 18%
• Ingots 15%
• Energy gap 15%
• Atoms 14%
• Durability 11%
• Carbon 10%
• Defects 9%
• Hot Temperature 6%

Physics & Astronomy

• oxygenation 88%
• wafers 51%
• oxygen 41%
• detectors 38%
• float zones 38%
• radiation 37%
• silicon 37%
• fabrication 16%
• endurance 16%
• thermal diffusion 15%
• ingots 15%
• damage 9%
• carbon 9%
• electrical resistivity 8%
• defects 7%
• atoms 6%
• performance 6%

Chemistry

• Oxygenation 76%
• Dioxygen 33%
• Thermal Diffusion 18%
• Band Gap 10%
• Modification 7%
• Carbon Atom 6%