Silicon resistor to measure temperature during rapid thermal annealing

B. S. Lim, E. Ma, M. A. Nicolet, M. Nathan

Research output: Contribution to journalArticlepeer-review

Abstract

A resistor composed of a piece of Si wafer and two thin silver wires attached to it, can reliably sense the temperature during rapid thermal annealing (RTA). As constant electric current passes through the Si piece, the resistivity change of Si with temperature produces a voltage signal that can be readily calibrated and converted to an actual temperature of the samples. An accuracy better than ±10° C is achieved between 300°and 600° C.

Original languageEnglish
Pages (from-to)182-183
Number of pages2
JournalReview of Scientific Instruments
Volume59
Issue number1
DOIs
StatePublished - 1988
Externally publishedYes

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