Silicon heating by a microwave-drill applicator with optical thermometry

R. Herskowits*, P. Livshits, S. Stepanov, O. Aktushev, S. Ruschin, E. Jerby

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract

This paper presents a method for heating silicon wafers locally by open-end coaxial microwave applicators, with optical techniques employed for measuring the temperature. Silicon samples of ∼2 × 2 cm2 area were radiated in air atmosphere by a microwave drill operating at 2.45 GHz in the range of 20-450 W. The rate of temperature variation was measured by the Fabry-Pérot etalon effect in samples illuminated by InGaAs lasers. The steady-state temperatures were measured by the changes in the absorption index of an InGaAs laser beam. The experimental results indicate heating rates of ∼150 K s-1 and a temperature range of 300-900 K across the silicon sample during the microwave heating process. Further operation of the microwave drill caused local melting of the silicon samples. This paper presents the experimental setup and results, as well as numerical simulations of the microwave heating process.

Original languageEnglish
Article number006
Pages (from-to)863-869
Number of pages7
JournalSemiconductor Science and Technology
Volume22
Issue number8
DOIs
StatePublished - 1 Aug 2007

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