Sensitivity of LWR and CD linearity to process conditions in active area

Guy Ayal*, Elena Malkes, Efraim Aharoni, Shimon Levi, Amit Siany, Ofer Adan, Eitan Shauly, Yosi Shacham-Diamand

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

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