Self-Excitation in Electrostatically Actuated Non-Identical Coupled Curved Microbeams

Lior Medina; Ashwin A. Seshia

doi:10.1109/EFTF/IFCS54560.2022.9850928

Self-Excitation in Electrostatically Actuated Non-Identical Coupled Curved Microbeams

Lior Medina, Ashwin A. Seshia

School of Mechanical Engineering

University of Cambridge

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

We report on an experimental demonstration of an open-loop self-excitation (OPSE) response in a microstructure composed of two initially curved and non-identical microbeams. One of the beams faces the electrode (beam #1), exposing it to displacement-dependent electrostatic loading, whilst the second beam (beam #2) experiences a 'mechanical', displacement-independent emanating from a truss set in between the two beams. The SE is triggered at high voltages, where one would expect to encounter a pull-in (PI) response. However, the presence of an SE appears to prevent a PI towards the electrode from occurring. The existence of an SE response, which can occur, regardless of any added modification to the circuit, suggests that such a response is an intrinsic feature of the microstructure.

Original language	English
Title of host publication	2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFCS 2022 - Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781665497183
DOIs	https://doi.org/10.1109/EFTF/IFCS54560.2022.9850928
State	Published - 2022
Event	2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFCS 2022 - Paris, France Duration: 24 Apr 2022 → 28 Apr 2022

Publication series

Name	2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFCS 2022 - Proceedings

Conference

Conference	2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFCS 2022
Country/Territory	France
City	Paris
Period	24/04/22 → 28/04/22

Keywords

Electrostatic actuation
MEMS/NEMS
Pull-in
Quasi-static loading

Access to Document

10.1109/EFTF/IFCS54560.2022.9850928

Cite this

Medina, L., & Seshia, A. A. (2022). Self-Excitation in Electrostatically Actuated Non-Identical Coupled Curved Microbeams. In 2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFCS 2022 - Proceedings (2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFCS 2022 - Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/EFTF/IFCS54560.2022.9850928

Medina, Lior ; Seshia, Ashwin A. / Self-Excitation in Electrostatically Actuated Non-Identical Coupled Curved Microbeams. 2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFCS 2022 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2022. (2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFCS 2022 - Proceedings).

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abstract = "We report on an experimental demonstration of an open-loop self-excitation (OPSE) response in a microstructure composed of two initially curved and non-identical microbeams. One of the beams faces the electrode (beam #1), exposing it to displacement-dependent electrostatic loading, whilst the second beam (beam #2) experiences a 'mechanical', displacement-independent emanating from a truss set in between the two beams. The SE is triggered at high voltages, where one would expect to encounter a pull-in (PI) response. However, the presence of an SE appears to prevent a PI towards the electrode from occurring. The existence of an SE response, which can occur, regardless of any added modification to the circuit, suggests that such a response is an intrinsic feature of the microstructure.",

keywords = "Electrostatic actuation, MEMS/NEMS, Pull-in, Quasi-static loading",

author = "Lior Medina and Seshia, {Ashwin A.}",

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doi = "10.1109/EFTF/IFCS54560.2022.9850928",

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Medina, L & Seshia, AA 2022, Self-Excitation in Electrostatically Actuated Non-Identical Coupled Curved Microbeams. in 2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFCS 2022 - Proceedings. 2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFCS 2022 - Proceedings, Institute of Electrical and Electronics Engineers Inc., 2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFCS 2022, Paris, France, 24/04/22. https://doi.org/10.1109/EFTF/IFCS54560.2022.9850928

Self-Excitation in Electrostatically Actuated Non-Identical Coupled Curved Microbeams. / Medina, Lior; Seshia, Ashwin A.
2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFCS 2022 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2022. (2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFCS 2022 - Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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N2 - We report on an experimental demonstration of an open-loop self-excitation (OPSE) response in a microstructure composed of two initially curved and non-identical microbeams. One of the beams faces the electrode (beam #1), exposing it to displacement-dependent electrostatic loading, whilst the second beam (beam #2) experiences a 'mechanical', displacement-independent emanating from a truss set in between the two beams. The SE is triggered at high voltages, where one would expect to encounter a pull-in (PI) response. However, the presence of an SE appears to prevent a PI towards the electrode from occurring. The existence of an SE response, which can occur, regardless of any added modification to the circuit, suggests that such a response is an intrinsic feature of the microstructure.

AB - We report on an experimental demonstration of an open-loop self-excitation (OPSE) response in a microstructure composed of two initially curved and non-identical microbeams. One of the beams faces the electrode (beam #1), exposing it to displacement-dependent electrostatic loading, whilst the second beam (beam #2) experiences a 'mechanical', displacement-independent emanating from a truss set in between the two beams. The SE is triggered at high voltages, where one would expect to encounter a pull-in (PI) response. However, the presence of an SE appears to prevent a PI towards the electrode from occurring. The existence of an SE response, which can occur, regardless of any added modification to the circuit, suggests that such a response is an intrinsic feature of the microstructure.

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Medina L, Seshia AA. Self-Excitation in Electrostatically Actuated Non-Identical Coupled Curved Microbeams. In 2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFCS 2022 - Proceedings. Institute of Electrical and Electronics Engineers Inc. 2022. (2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFCS 2022 - Proceedings). doi: 10.1109/EFTF/IFCS54560.2022.9850928

Self-Excitation in Electrostatically Actuated Non-Identical Coupled Curved Microbeams

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Keywords

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