TY - GEN
T1 - Self-Excitation in Electrostatically Actuated Non-Identical Coupled Curved Microbeams
AU - Medina, Lior
AU - Seshia, Ashwin A.
N1 - Publisher Copyright:
© 2022 IEEE.
PY - 2022
Y1 - 2022
N2 - We report on an experimental demonstration of an open-loop self-excitation (OPSE) response in a microstructure composed of two initially curved and non-identical microbeams. One of the beams faces the electrode (beam #1), exposing it to displacement-dependent electrostatic loading, whilst the second beam (beam #2) experiences a 'mechanical', displacement-independent emanating from a truss set in between the two beams. The SE is triggered at high voltages, where one would expect to encounter a pull-in (PI) response. However, the presence of an SE appears to prevent a PI towards the electrode from occurring. The existence of an SE response, which can occur, regardless of any added modification to the circuit, suggests that such a response is an intrinsic feature of the microstructure.
AB - We report on an experimental demonstration of an open-loop self-excitation (OPSE) response in a microstructure composed of two initially curved and non-identical microbeams. One of the beams faces the electrode (beam #1), exposing it to displacement-dependent electrostatic loading, whilst the second beam (beam #2) experiences a 'mechanical', displacement-independent emanating from a truss set in between the two beams. The SE is triggered at high voltages, where one would expect to encounter a pull-in (PI) response. However, the presence of an SE appears to prevent a PI towards the electrode from occurring. The existence of an SE response, which can occur, regardless of any added modification to the circuit, suggests that such a response is an intrinsic feature of the microstructure.
KW - Electrostatic actuation
KW - MEMS/NEMS
KW - Pull-in
KW - Quasi-static loading
UR - http://www.scopus.com/inward/record.url?scp=85137352063&partnerID=8YFLogxK
U2 - 10.1109/EFTF/IFCS54560.2022.9850928
DO - 10.1109/EFTF/IFCS54560.2022.9850928
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AN - SCOPUS:85137352063
T3 - 2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFCS 2022 - Proceedings
BT - 2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFCS 2022 - Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
Y2 - 24 April 2022 through 28 April 2022
ER -