RF radiation-Ar plasma interaction: Modeling propagation, absorption and reflection

E. Gidalevich, R. L. Boxman

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

RF radiation - Ar plasma interaction is analyzed in the case where the plasma is excited by an RF plane wave and reflection is self-consistently considered. Penetration of the RF radiation as well as electron temperature distribution and system efficiency are calculated. Ionization and Joule heating of the plasma are found to be concentrated within a distance c/ω adjacent to the plasma boundary facing the incident plane wave.

Original languageEnglish
Title of host publicationMicrowave and RF Power Applications
Subtitle of host publicationProceeding of the 13th International Conference on Microwave and Radio Frequency Heating, AMPERE 2011
PublisherEditions Cepadues
Pages419-421
Number of pages3
ISBN (Print)9782854289787
StatePublished - 2011
Event13th International Conference on Microwave and Radio Frequency Heating, AMPERE 2011 - Toulouse, France
Duration: 5 Sep 20118 Sep 2011

Publication series

NameMicrowave and RF Power Applications: Proceeding of the 13th International Conference on Microwave and Radio Frequency Heating, AMPERE 2011

Conference

Conference13th International Conference on Microwave and Radio Frequency Heating, AMPERE 2011
Country/TerritoryFrance
CityToulouse
Period5/09/118/09/11

Keywords

  • Joule heating
  • Plasma
  • RF radiation

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