Resonant pressure sensing using a micromechanical cantilever actuated by fringing electrostatic fields

Naftaly Krakover; B. Robert Hic; Slava Krylov

doi:10.1109/MEMSYS.2018.8346688

Resonant pressure sensing using a micromechanical cantilever actuated by fringing electrostatic fields

Naftaly Krakover, B. Robert Hic, Slava Krylov

School of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

We demonstrate a pressure-sensing approach based on the resonant operation of a single-crystal Si cantilever positioned near a flexible, pressurized membrane. The membrane deflection perturbs the electrostatic force acting on the cantilever and consequently alters the beam's resonant frequency. Sensitivity was enhanced by tailoring the actuating force nonlinearities through fringing electrostatic fields. With our coupled micromechanical system, we achieved frequency sensitivity to pressure and displacement of ≈ 30 Hz/kPa and -4 Hz/nm, respectively. Our results indicate that the suggested approach may have applications not only for pressure measurements, but also in a broad range of microelectromechanical resonant inertial, force, mass and bio sensors.

Original language	English
Title of host publication	2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	846-849
Number of pages	4
ISBN (Electronic)	9781538647820
DOIs	https://doi.org/10.1109/MEMSYS.2018.8346688
State	Published - 24 Apr 2018
Event	31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast, United Kingdom Duration: 21 Jan 2018 → 25 Jan 2018

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2018-January
ISSN (Print)	1084-6999

Conference

Conference	31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
Country/Territory	United Kingdom
City	Belfast
Period	21/01/18 → 25/01/18

Access to Document

10.1109/MEMSYS.2018.8346688

Cite this

Krakover, N., Hic, B. R., & Krylov, S. (2018). Resonant pressure sensing using a micromechanical cantilever actuated by fringing electrostatic fields. In 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018 (pp. 846-849). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2018-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2018.8346688

Krakover, Naftaly ; Hic, B. Robert ; Krylov, Slava. / Resonant pressure sensing using a micromechanical cantilever actuated by fringing electrostatic fields. 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc., 2018. pp. 846-849 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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title = "Resonant pressure sensing using a micromechanical cantilever actuated by fringing electrostatic fields",

abstract = "We demonstrate a pressure-sensing approach based on the resonant operation of a single-crystal Si cantilever positioned near a flexible, pressurized membrane. The membrane deflection perturbs the electrostatic force acting on the cantilever and consequently alters the beam's resonant frequency. Sensitivity was enhanced by tailoring the actuating force nonlinearities through fringing electrostatic fields. With our coupled micromechanical system, we achieved frequency sensitivity to pressure and displacement of ≈ 30 Hz/kPa and -4 Hz/nm, respectively. Our results indicate that the suggested approach may have applications not only for pressure measurements, but also in a broad range of microelectromechanical resonant inertial, force, mass and bio sensors.",

author = "Naftaly Krakover and Hic, {B. Robert} and Slava Krylov",

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doi = "10.1109/MEMSYS.2018.8346688",

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Krakover, N, Hic, BR & Krylov, S 2018, Resonant pressure sensing using a micromechanical cantilever actuated by fringing electrostatic fields. in 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2018-January, Institute of Electrical and Electronics Engineers Inc., pp. 846-849, 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, United Kingdom, 21/01/18. https://doi.org/10.1109/MEMSYS.2018.8346688

Resonant pressure sensing using a micromechanical cantilever actuated by fringing electrostatic fields. / Krakover, Naftaly; Hic, B. Robert; Krylov, Slava.
2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc., 2018. p. 846-849 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2018-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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Krakover N, Hic BR, Krylov S. Resonant pressure sensing using a micromechanical cantilever actuated by fringing electrostatic fields. In 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc. 2018. p. 846-849. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2018.8346688

Resonant pressure sensing using a micromechanical cantilever actuated by fringing electrostatic fields

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