Resonant Accelerometer with Compliant Parallel Motion Linkage Force Amplification Mechanism

Omer Halevy, Stella Lulinsky, Slava Krylov

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

We report on a novel architecture of a resonant accelerometer incorporating four proof masses and a compliant parallel motion linkage as a force amplifier. A simple, Manhattan geometry, manufacturable, device is distinguished by low parasitic compliance and purely axial, lacking any bending, loading of the sensing beams. Silicon on insulator (SOI) devices were operated in open loop and in a non-differential mode, the acceleration was emulated by an electrostatic force. Consistently with the model prediction a sensitivity of ≈ 2.3 Hz/V2, which is equivalent to ≈ 417 Hz/g, was experimentally demonstrated in a Si device with ≈ 500 μm × 480 μm × 25 μm masses and 250 μm long and ≈ 1.5 μm wide resonant sensing beams.

Original languageEnglish
Title of host publicationINERTIAL 2021 - 8th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781728150994
DOIs
StatePublished - 22 Mar 2021
Event8th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2021 - Virtual, Kailua-Kona, United States
Duration: 22 Mar 202125 Mar 2021

Publication series

NameINERTIAL 2021 - 8th IEEE International Symposium on Inertial Sensors and Systems, Proceedings

Conference

Conference8th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2021
Country/TerritoryUnited States
CityVirtual, Kailua-Kona
Period22/03/2125/03/21

Keywords

  • compliant mechanism
  • electrostatic actuation
  • force amplification
  • resonant accelerometer

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