TY - GEN
T1 - Resonant Accelerometer with Compliant Parallel Motion Linkage Force Amplification Mechanism
AU - Halevy, Omer
AU - Lulinsky, Stella
AU - Krylov, Slava
N1 - Publisher Copyright:
© 2021 IEEE.
PY - 2021/3/22
Y1 - 2021/3/22
N2 - We report on a novel architecture of a resonant accelerometer incorporating four proof masses and a compliant parallel motion linkage as a force amplifier. A simple, Manhattan geometry, manufacturable, device is distinguished by low parasitic compliance and purely axial, lacking any bending, loading of the sensing beams. Silicon on insulator (SOI) devices were operated in open loop and in a non-differential mode, the acceleration was emulated by an electrostatic force. Consistently with the model prediction a sensitivity of ≈ 2.3 Hz/V2, which is equivalent to ≈ 417 Hz/g, was experimentally demonstrated in a Si device with ≈ 500 μm × 480 μm × 25 μm masses and 250 μm long and ≈ 1.5 μm wide resonant sensing beams.
AB - We report on a novel architecture of a resonant accelerometer incorporating four proof masses and a compliant parallel motion linkage as a force amplifier. A simple, Manhattan geometry, manufacturable, device is distinguished by low parasitic compliance and purely axial, lacking any bending, loading of the sensing beams. Silicon on insulator (SOI) devices were operated in open loop and in a non-differential mode, the acceleration was emulated by an electrostatic force. Consistently with the model prediction a sensitivity of ≈ 2.3 Hz/V2, which is equivalent to ≈ 417 Hz/g, was experimentally demonstrated in a Si device with ≈ 500 μm × 480 μm × 25 μm masses and 250 μm long and ≈ 1.5 μm wide resonant sensing beams.
KW - compliant mechanism
KW - electrostatic actuation
KW - force amplification
KW - resonant accelerometer
UR - http://www.scopus.com/inward/record.url?scp=85107572135&partnerID=8YFLogxK
U2 - 10.1109/INERTIAL51137.2021.9430489
DO - 10.1109/INERTIAL51137.2021.9430489
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AN - SCOPUS:85107572135
T3 - INERTIAL 2021 - 8th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
BT - INERTIAL 2021 - 8th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 8th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2021
Y2 - 22 March 2021 through 25 March 2021
ER -