Abstract
High-efficiency resonance-domain diffractive microlens arrays with high numerical apertures and 100% fill factor were designed, fabricated, and characterized. Fabricated arrays of eight off-axis microlenses with pitch 127 μm and numerical aperture 0.2 demonstrated diffraction-limited collimation of fiber light at 632.8 nm wavelength. Optical measurements revealed diffraction efficiency exceeding 93%, in match to numerical calculations with rigorous conical diffraction. The resonance-domain diffractive microlens arrays are highly suitable for applications in fiber optics, multispot optical tweezers, optical sensors, and spectrometry.
Original language | English |
---|---|
Pages (from-to) | 5299-5306 |
Number of pages | 8 |
Journal | Applied Optics |
Volume | 57 |
Issue number | 19 |
DOIs | |
State | Published - 1 Jul 2018 |