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Recent developments in vacuum arc deposition
Raymond L. Boxman
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Corresponding author for this work
School of Electrical Engineering
IEEE
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Article
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peer-review
44
Scopus citations
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Keyphrases
Coating Film
50%
Decorative Coatings
50%
Filtered Vacuum Arc Deposition
50%
Free-standing Film
50%
Hot Electrode
50%
Industrial Arts
50%
Integrated Circuits
50%
Macroparticles
50%
Magnetic Medium
50%
Metallized
50%
Tool Coating
50%
Vacuum Arc
50%
Vacuum Arc Deposition
100%
Wear-resistant Coatings
50%
Material Science
Electronic Circuit
50%
Film
100%
Magnetic Memory
50%
Metallization
50%
Engineering
Integrated Circuit
100%
Macroparticles
100%