Recent developments in vacuum arc deposition

Raymond L. Boxman*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review


Vacuum arc deposition (VAD) has become an established industrial art for producing hard, wear-resistant and decorative coatings. Sophisticated coatings, including tertiary compounds and multilayers, are increasingly used. Filtered VAD and hot electrode vacuum arcs are increasingly investigated to obtain high-quality, macroparticle-free films. Improved filtered sources, including large rectangular filters, have been demonstrated. Besides tool coatings, films for metallizing integrated circuits and protecting magnetic media are being developed.

Original languageEnglish
Pages (from-to)762-767
Number of pages6
JournalIEEE Transactions on Plasma Science
Issue number5 I
StatePublished - Oct 2001


  • Cathodic arc
  • Coatings
  • Filtered vacuum arc
  • Thin films
  • Vacuum arc


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