TY - JOUR
T1 - Recent advances in three dimensional thin film microbatteries
AU - Nathan, M.
AU - Golodnitsky, D.
AU - Yufit, V.
AU - Strauss, E.
AU - Ripenbein, T.
AU - Shechtman, I.
AU - Menkin, S.
AU - Peled, E.
PY - 2005
Y1 - 2005
N2 - Autonomous MEMS require similarly miniaturized power sources. We present the first three-dimensional (3D) working thin-film microbattery (MB) technology that is compatible with MEMS requirements. Our 3D MBs are formed in perforated substrates (silicon chip or glass microchannel plate), in which a sandwich-like thin-film battery structure is deposited conformally and sequentially on all available surfaces, using wet chemistry. The area of high aspect ratio holes in the substrate enhances the capacity and energy density per given substrate footprint by more than an order of magnitude. Full 3D cells were manufactured on both glass and silicon substrates. A 3D cell on a micro-channel plate substrate exhibited a capacity of ca. 2mAh/cm2, in good agreement with the ca. 23 times area gain provided vs an identical footprint 2D cell.
AB - Autonomous MEMS require similarly miniaturized power sources. We present the first three-dimensional (3D) working thin-film microbattery (MB) technology that is compatible with MEMS requirements. Our 3D MBs are formed in perforated substrates (silicon chip or glass microchannel plate), in which a sandwich-like thin-film battery structure is deposited conformally and sequentially on all available surfaces, using wet chemistry. The area of high aspect ratio holes in the substrate enhances the capacity and energy density per given substrate footprint by more than an order of magnitude. Full 3D cells were manufactured on both glass and silicon substrates. A 3D cell on a micro-channel plate substrate exhibited a capacity of ca. 2mAh/cm2, in good agreement with the ca. 23 times area gain provided vs an identical footprint 2D cell.
UR - http://www.scopus.com/inward/record.url?scp=20344365319&partnerID=8YFLogxK
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AN - SCOPUS:20344365319
SN - 0272-9172
VL - 835
SP - 367
EP - 372
JO - Materials Research Society Symposium Proceedings
JF - Materials Research Society Symposium Proceedings
M1 - K10.10
T2 - Solid State Ionics - 2004
Y2 - 29 November 2004 through 2 December 2004
ER -