Real-time synchronous imaging of electromechanical resonator mode and equilibrium profiles

Y. Linzon; S. Krylov; B. Ilic; D. R. Southworth; R. A. Barton; B. R. Cipriany; J. D. Cross; J. M. Parpia; H. G. Craighead

doi:10.1364/OL.35.002654

Real-time synchronous imaging of electromechanical resonator mode and equilibrium profiles

Y. Linzon^*, S. Krylov, B. Ilic, D. R. Southworth, R. A. Barton, B. R. Cipriany, J. D. Cross, J. M. Parpia, H. G. Craighead

^*Corresponding author for this work

School of Mechanical Engineering

Cornell University

Research output: Contribution to journal › Article › peer-review

12 Scopus citations

Abstract

Interferometric imaging of normal mode dynamics in electromechanical resonators, oscillating in the rf regime, is demonstrated by synchronous imaging with a pulsed nanosecond laser. Profiles of mechanical modes in suspended thin film structures and their equilibrium profiles are measured through all-optical Fabry-Perot reflectance fits to the temporal traces. As a proof of principle, the mode patterns of a microdrum silicon resonator are visualized, and the extracted vibration modes and equilibrium profile show good agreement with numerical estimations.

Original language	English
Pages (from-to)	2654-2656
Number of pages	3
Journal	Optics Letters
Volume	35
Issue number	15
DOIs	https://doi.org/10.1364/OL.35.002654
State	Published - 1 Aug 2010

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title = "Real-time synchronous imaging of electromechanical resonator mode and equilibrium profiles",

abstract = "Interferometric imaging of normal mode dynamics in electromechanical resonators, oscillating in the rf regime, is demonstrated by synchronous imaging with a pulsed nanosecond laser. Profiles of mechanical modes in suspended thin film structures and their equilibrium profiles are measured through all-optical Fabry-Perot reflectance fits to the temporal traces. As a proof of principle, the mode patterns of a microdrum silicon resonator are visualized, and the extracted vibration modes and equilibrium profile show good agreement with numerical estimations.",

author = "Y. Linzon and S. Krylov and B. Ilic and Southworth, {D. R.} and Barton, {R. A.} and Cipriany, {B. R.} and Cross, {J. D.} and Parpia, {J. M.} and Craighead, {H. G.}",

year = "2010",

month = aug,

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doi = "10.1364/OL.35.002654",

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T1 - Real-time synchronous imaging of electromechanical resonator mode and equilibrium profiles

AU - Linzon, Y.

AU - Krylov, S.

AU - Ilic, B.

AU - Southworth, D. R.

AU - Barton, R. A.

AU - Cipriany, B. R.

AU - Cross, J. D.

AU - Parpia, J. M.

AU - Craighead, H. G.

PY - 2010/8/1

Y1 - 2010/8/1

N2 - Interferometric imaging of normal mode dynamics in electromechanical resonators, oscillating in the rf regime, is demonstrated by synchronous imaging with a pulsed nanosecond laser. Profiles of mechanical modes in suspended thin film structures and their equilibrium profiles are measured through all-optical Fabry-Perot reflectance fits to the temporal traces. As a proof of principle, the mode patterns of a microdrum silicon resonator are visualized, and the extracted vibration modes and equilibrium profile show good agreement with numerical estimations.

AB - Interferometric imaging of normal mode dynamics in electromechanical resonators, oscillating in the rf regime, is demonstrated by synchronous imaging with a pulsed nanosecond laser. Profiles of mechanical modes in suspended thin film structures and their equilibrium profiles are measured through all-optical Fabry-Perot reflectance fits to the temporal traces. As a proof of principle, the mode patterns of a microdrum silicon resonator are visualized, and the extracted vibration modes and equilibrium profile show good agreement with numerical estimations.

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VL - 35

SP - 2654

EP - 2656

JO - Optics Letters

JF - Optics Letters

IS - 15

ER -

Real-time synchronous imaging of electromechanical resonator mode and equilibrium profiles

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