Pull-in study of an electrostatic torsion microactuator

Ofir Degani, Eran Socher, Ariel Lipson, Tomer Leitner, Dan J. Setter, Shmuel Kaldor, Yael Nemirovsky

Research output: Contribution to journalArticlepeer-review

Abstract

Pull-in study of an electrostatic microactuator is essential for making the electrostatic actuation more effective. In this paper, pull-in analysis is presented for an electrostatic torsion microactuator. The torsion microactuator can be used as a microtorsion mirror. A polynomial algebraic equation for the pull-in voltage and pull-in angle of a torsion microactuator is derived. Two types of microactuators fabricated using bulk micromachining are presented. Measurements done on the fabricated microactuators are reported, showing deviations within 1% error from the calculations. [325].

Original languageEnglish
Pages (from-to)373-378
Number of pages6
JournalJournal of Microelectromechanical Systems
Volume7
Issue number4
DOIs
StatePublished - Dec 1998
Externally publishedYes

Keywords

  • Electrostatic
  • Microactuator
  • Micromirror
  • Pullin
  • Torsion

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