@article{61bdedebf57d4e6783d26071d27c3bb2,
title = "Pull-in study of an electrostatic torsion microactuator",
abstract = "Pull-in study of an electrostatic microactuator is essential for making the electrostatic actuation more effective. In this paper, pull-in analysis is presented for an electrostatic torsion microactuator. The torsion microactuator can be used as a microtorsion mirror. A polynomial algebraic equation for the pull-in voltage and pull-in angle of a torsion microactuator is derived. Two types of microactuators fabricated using bulk micromachining are presented. Measurements done on the fabricated microactuators are reported, showing deviations within 1% error from the calculations. [325].",
keywords = "Electrostatic, Microactuator, Micromirror, Pullin, Torsion",
author = "Ofir Degani and Eran Socher and Ariel Lipson and Tomer Leitner and Setter, {Dan J.} and Shmuel Kaldor and Yael Nemirovsky",
note = "Funding Information: Manuscript received January 19, 1998; revised July 13, 1998. This work was supported by the Israeli Ministry of Science. Subject Editor, S. D. Senturia. O. Degani, E. Socher, A. Lipson, T. Leitner, and Y. Nemirovsky are with the Kidron Microelectronics Research Center, Department of Electrical Engineering, Technion—Israel Institute of Technology, Haifa 32000, Israel. D. J. Setter and S. Kaldor are with the MEMOS Laboratory, RAFAEL—Armament Development Authority, Haifa 31021, Israel. Publisher Item Identifier S 1057-7157(98)08733-2.",
year = "1998",
month = dec,
doi = "10.1109/84.735344",
language = "אנגלית",
volume = "7",
pages = "373--378",
journal = "Journal of Microelectromechanical Systems",
issn = "1057-7157",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "4",
}
