Pull-in dynamics of an elastic beam actuated by distributed electrostatic force

Slava Krylov, Ronen Maimon

Research output: Contribution to conferencePaperpeer-review

Abstract

A detailed study of the transient nonlinear dynamics of an electrically actuated micron scale beam is presented. A model developed using the Galerkin procedure with normal modes as a basis accounts for the distributed nonlinear electrostatic forces, nonlinear distributed squeezed film damping forces, and rotational inertia of a mass carried by the beam. Special attention is paid to the dynamics of the beam near instability points. Results generated by the model and confirmed experimentally show that nonlinear damping leads to shrinkage of the spatial region where stable motion is realizable. The voltage that causes dynamic instability, in turn, approaches the static pull-in value.

Original languageEnglish
Pages1779-1787
Number of pages9
DOIs
StatePublished - 2003
Event2003 ASME Design Engineering Technical Conferences and Computers and Information in Engineering Conference - Chicago, IL, United States
Duration: 2 Sep 20036 Sep 2003

Conference

Conference2003 ASME Design Engineering Technical Conferences and Computers and Information in Engineering Conference
Country/TerritoryUnited States
CityChicago, IL
Period2/09/036/09/03

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