A detailed study of the transient nonlinear dynamics of an electrically actuated micron scale beam is presented. A model developed using the Galerkin procedure with normal modes as a basis accounts for the distributed nonlinear electrostatic forces, nonlinear distributed squeezed film damping forces, and rotational inertia of a mass carried by the beam. Special attention is paid to the dynamics of the beam near instability points. Results generated by the model and confirmed experimentally show that nonlinear damping leads to shrinkage of the spatial region where stable motion is realizable. The voltage that causes dynamic instability, in turn, approaches the static pull-in value.
|Number of pages||9|
|State||Published - 2003|
|Event||2003 ASME Design Engineering Technical Conferences and Computers and Information in Engineering Conference - Chicago, IL, United States|
Duration: 2 Sep 2003 → 6 Sep 2003
|Conference||2003 ASME Design Engineering Technical Conferences and Computers and Information in Engineering Conference|
|Period||2/09/03 → 6/09/03|