Protection of silicon wafers from alkali contamination during high-temperature processing using electric field

M. Beregovsky*, A. Klyuch, Y. Raskin, Y. Zinman, Y. Shacham-Diamand, B. E. Deal

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

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Keyphrases

Material Science

Engineering

Chemistry

Earth and Planetary Sciences