Properties of 50 nm electroless films Ag-W-oxygen before and after low temperature, low activation energy resistivity decay

E. Glickman*, A. Inberg, G. Aviram, R. Popovitz, N. Croitoru, Y. Shacham-Diamand

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

5 Scopus citations

Abstract

50 nm films Ag-(0.3-1 at.% W)-oxygen deposited by electroless onto Pd activated SiO2/Si show fast, low activation energy decay of their electrical resistivity ρ after annealing above the threshold temperature T* = 90 ± 10 °C. The decrease in ρ was attributed in our previous works to surface diffusion controlled sintering. In attempt to understand the mechanism of this interesting effect we studied further the origin of open porosity, W segregation, evolution of the tungstate phase Ag2W2O7 at the internal interfaces and temporal evolution of surface roughness in the course of annealing. A possible role of the tungstate phase transition to super ion conductive state in the diffusion mobility of Ag is speculated.

Original languageEnglish
Pages (from-to)2359-2363
Number of pages5
JournalMicroelectronic Engineering
Volume83
Issue number11-12
DOIs
StatePublished - Nov 2006

Keywords

  • Ag-W-oxygen films
  • Electrical resistivity
  • Porosity
  • Sintering
  • Surface diffusion

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