Abstract
50 nm films Ag-(0.3-1 at.% W)-oxygen deposited by electroless onto Pd activated SiO2/Si show fast, low activation energy decay of their electrical resistivity ρ after annealing above the threshold temperature T* = 90 ± 10 °C. The decrease in ρ was attributed in our previous works to surface diffusion controlled sintering. In attempt to understand the mechanism of this interesting effect we studied further the origin of open porosity, W segregation, evolution of the tungstate phase Ag2W2O7 at the internal interfaces and temporal evolution of surface roughness in the course of annealing. A possible role of the tungstate phase transition to super ion conductive state in the diffusion mobility of Ag is speculated.
Original language | English |
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Pages (from-to) | 2359-2363 |
Number of pages | 5 |
Journal | Microelectronic Engineering |
Volume | 83 |
Issue number | 11-12 |
DOIs | |
State | Published - Nov 2006 |
Keywords
- Ag-W-oxygen films
- Electrical resistivity
- Porosity
- Sintering
- Surface diffusion