@inproceedings{ebd37fc8ee8449f39733495d4fed3087,
title = "Process of CoPt alloys electrodeposition for MEMS/NEMS applications",
abstract = "CoPt electrodeposited alloys present high interest for application in MEMS/NEMS, because of their interesting magnetic characteristics. Integration of CoPt films into MEMS/NEMS devices is hampered by instability of the deposition process (change of the deposition current efficiency and CoPt alloy characteristics with the total charge passed through the electrolyte in the previous runs). The deposition process of CoPt alloys from ammonium citrate electrolyte containing the diammine-dinitrito-platinum (II) complex as the source of Pt is considered in terms of its stability and reliability. Removal of NO2- ligands by thermal treatment of Pt complex allows the elimination of the total charge effect on deposition current efficiency. The role of ammonia loss during pretreatment and operation is discussed.",
author = "O. Berkh and Y. Shacham-Diamand and E. Gileadi",
year = "2009",
doi = "10.1149/1.3140014",
language = "אנגלית",
isbn = "9781615673162",
series = "ECS Transactions",
number = "45",
pages = "101--117",
booktitle = "ECS Transactions - Magnetic Materials, Processes and Devices 10 - 214th ECS Meeting",
edition = "45",
note = "Magnetic Materials, Processes and Devices 10 - 214th ECS Meeting ; Conference date: 12-10-2008 Through 17-10-2008",
}