Preparation and patterning of YBaCuO thin films obtained by sequential deposition of CuOx/Y2O3/BaF2

Nir Hess*, Leandro R. Tessler, Uri Dai, Guy Deutscher

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract

Superconducting thin films of YBaCuO were prepared by stacking layers of CuOx, Y2O3, and BaF2 onto substrates held at room temperature. The CuOx layer was obtained by oxidizing in air a previously deposited metallic Cu film. After deposition of the subsequent layers, the films were annealed at 880°C in flowing oxygen. Samples 1 μm thick on sapphire showed an onset at Tonset c =85 K and zero resistance at T0c =70 K; on yttria-stabilized zirconia (YSZ), Tonsetc =90 K and T 0c =80 K. Patterned films are easily obtained by applying conventional photolithographic methods to the Cu film.

Original languageEnglish
Pages (from-to)698-699
Number of pages2
JournalApplied Physics Letters
Volume53
Issue number8
DOIs
StatePublished - 1988

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