Portable spatially incoherent holography for optical profiling of sharp-edge objects

Amit Nativ*, Natan T. Shaked

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We present a compact and external common-path off-axis interferometer with spatially incoherent illumination, and demonstrate using it for profiling semiconductor silicon wafers with sharp-edge contacts.

Original languageEnglish
Title of host publicationDigital Holography and Three-Dimensional Imaging, DH 2016
PublisherOptica Publishing Group (formerly OSA)
ISBN (Print)9781943580156
DOIs
StatePublished - 18 Jul 2016
EventDigital Holography and Three-Dimensional Imaging, DH 2016 - Heidelberg, Germany
Duration: 25 Jul 201628 Jul 2016

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Conference

ConferenceDigital Holography and Three-Dimensional Imaging, DH 2016
Country/TerritoryGermany
CityHeidelberg
Period25/07/1628/07/16

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